Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 4 : Preface

conference paper
2014
Roozeboom, F.

Narayanan, V.

Kakushima, K.

Timans, P.J.

Gusev, E.P.

Kohl, P.A.

Leonte, O.M.
TNO Identifier
516759
Repository link
https://resolver.tno.nl/uuid:5b0b84f3-8fe7-4a6e-bfde-6841b7fd4866
ISSN
1938-6737
ISBN
978-1-60768-518-0
Source title
International Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 4 - 225th ECS Meeting, 12 May 2014 through 14 May 2014, Orlando, Florida
Collation
VIII p.
Pages
iii-viii
Files
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