Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization
article
In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot location and the cantilever properties. This phase lag is theoretically predicted and experimentally verified. Combined with thermo-mechanical properties of the cantilever and its geometry, the location of the laser spot, the thermal diffusivity, and the layer thicknesses of the cantilever can be extracted.
TNO Identifier
513476
ISSN
0003-6951
Source
Applied Physics Letters, 105, pp. 073109-1 - 073109-4.
Publisher
American Institute of Physics
Collation
5 p.
Pages
073109-1 - 073109-4