Atomic Layer Deposition Applications 10 : Preface

conference paper
2014
Roozeboom, F.

Gendt, S. De

Delabie, A.

Elam, J.W.

Londergan, A.

Straten, O. van der
TNO Identifier
513291
Repository link
https://resolver.tno.nl/uuid:3ff1762b-67be-44bb-adec-f76303999286
Publisher
ECS
Source title
International symposium on Atomic Layer Deposition Applications 10, held during the 226th Meeting of the Electrochemical Society. This meeting was held as a Joint International Meeting with the XXIX Congreso de la Sociedad Mexicana de Electroquímica (SMEQ) from Oct. 5 to 9, 2014, in the Moon Palace Resort in Cancun, Mexico.
Pages
I - VII
Files
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