Laser-assisted growth of carbon nanotubes on laser-patterned substrates and inside sealed micro-channels
conference paper
Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. To further investigate the possibilities of small CNT structures we present a femtosecond laser patterning method. This laser is used to pattern either the catalyst before CNT growth, modifying the surface and catalytic conditions, or the CNT structures directly after growth. cop. 2014 SPIE.
The Society of Photo-Optical Instrumentation Engineers (SPIE)
The Society of Photo-Optical Instrumentation Engineers (SPIE)
TNO Identifier
503208
ISSN
1996756X
ISBN
9780819498823
Publisher
SPIE
Source title
Synthesis and Photonics of Nanoscale Materials XI, 2 February 2014 through 4 February 2014, San Francisco, CA
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