Deep-level transient spectroscopy on an amorphous InGaZnO4 Schottky diode
article
The first direct measurement is reported of the bulk density of deep states in amorphous IGZO (indium-gallium-zinc oxide) semiconductor by means of deep-level transient spectroscopy (DLTS). The device under test is a Schottky diode of amorphous IGZO semiconductor on a palladium (Pd) Schottky-barrier electrode and with a molybdenum (Mo) Ohmic contact at the top. The DLTS technique allows to independently measure the energy and spatial distribution of subgap states in the IGZO thin film. The subgap trap concentration has a double exponential distribution as a function energy, with a value of ∼10 19 cm-3 eV-1 at the conduction band edge and a value of ∼1017 cm-3 eV-1 at an energy of 0.55 eV below the conduction band. Such spectral distribution, however, is not uniform through the semiconductor film. The spatial distribution of subgap states correlates well with the background doping density distribution in the semiconductor, which increases towards the Ohmic Mo contact, suggesting that these two properties share the same physical origin. cop. 2014 AIP Publishing LLC.
TNO Identifier
502665
ISSN
0003-6951
Source
Applied Physics Letters, 104(082112)
Collation
5 p.