Atomic Layer Deposition Applications 9 : Preface

conference paper
2013
Roozeboom, F.

Gendt, S. De

Delabie, A.

Elam, J.W.

Londergan, A.

Straten, O. van der
TNO Identifier
483371
Repository link
https://resolver.tno.nl/uuid:4a8fa863-0aa4-483f-a759-2ccfc35d2b99
Publisher
ECS
Source title
International symposium on Atomic Layer Deposition Applications 9, held during the 224th Meeting of the Electrochemical Society. From Oct. 27 to Nov. 1, 2013, in the city of San Francisco (CA, USA).
Pages
I - IX
Files
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