Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3 : Preface

conference paper
2013
Roozeboom, F.

Narayanan, V.

Kakushima, K.

Iwai, H.

Kwong, D.L.

Timans, P.J.

Gusev, E.P.
TNO Identifier
482975
Repository link
https://resolver.tno.nl/uuid:977b31b3-506c-4398-a938-f91334ef2859
ISSN
19385862
ISBN
9781607683766
Source title
International Symposium on Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3 - 223rd ECS Meeting, 12 May 2013 through 17 May 2013, Toronto, ON
Collation
VIII p.
Pages
iii-iv
Files
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