In-situ localized carbon nanotube growth inside partially sealed enclosures

article


Burgt, Y. van de

Champion, A.

Bellouard, Y.
Carbon nanotube assemblies can be used for specific applications such as sensors and filters. We present a method and proof-of-concept to directly grow vertically-aligned carbon nanotube structures within sealed enclosures by means of a feedback-controlled laser-assisted chemical vapor deposition technique. The process is compatible with a variety of micro-fabrication processes and bypasses the need for post-process packaging. Our experiments raise interesting observations related to the gas diffusion dynamics in micro-scale and sub-micron enclosures.
Topics








And filtersCarbon nanotube structuresCarbon nanotube growthGas diffusionLaser-assisted chemical vapor depositionsNanotube assembliesPost processProof of conceptChemical vapor deposition
TNO Identifier
482974
Repository link
https://resolver.tno.nl/uuid:c569ed9a-7f9b-4217-aa87-934cc552ebf7
ISSN
21583226
Source
AIP Advances, 3(9), pp. 092119-1 - 092119-6.
Publisher
AIP Publishing
Article nr.
092119
Pages
092119-1 - 092119-6
Files