Inline processed flexible thin film silicon solar cells using linear PECVD sources
conference paper
Using linear VHF and RF PECVD plasma sources, we have deposited intrinsic and doped silicon layers for roll-to-roll fabrication of thin film silicon solar cells on flexible steel foil substrates. First amorphous silicon solar cells have been made using this PECVD system resulting in efficiencies up to 6.6%. Keywords: a-Si solar cells, in-situ monitoring and diagnostics, large area deposition
Using linear VHF and RF PECVD plasma sources, we have deposited intrinsic and doped silicon layers for roll-to-roll fabrication of thin film silicon solar cells on flexible steel foil substrates. First amorphous silicon solar cells have been made using this PECVD system resulting in efficiencies up to 6.6%. Keywords: a-Si solar cells, in-situ monitoring and diagnostics, large area deposition
TNO Identifier
821745
Publisher
ECN
Source title
25th European Photovoltaic Solar Energy Conference and Exhibition - 5th World Conference on Photovoltaic Energy Conversion, Valencia, Spain, 6-10 september 2010.
Collation
4 p.
Place of publication
Petten
Pages
4 p.
Files