The mechanical properties modeling of nano-scale materials by molecular dynamics
bookPart
We propose a molecular modeling strategy which is capable of mod-eling the mechanical properties on nano-scale low-dielectric (low-k) materials. Such modeling strategy has been also validated by the bulking force of carbon nano tube (CNT). This modeling framework consists of model generation method, boundary condition setting and result extraction method. For the amorphous silicon-based low-dielectric (low-k) material, the impact of the porosity and pore size upon the elastic modulus are modeled. Due to the electronic requirement of advanced electronic devices, low-k materials are in demand for the IC backend structure. However, due to the amorphous nature and porosity of this material, it exhibits low mechanical stiffness and low interfacial strength, as well as inducing numerous reliability issues. The mechanical impact of the nano-scaled pore.
TNO Identifier
536118
ISBN
9781461417286
9781461417279
9781461417279
Publisher
Springer US
Source title
Molecular Modeling and Multiscaling Issues for Electronic Material Applications
Pages
115-131
Files
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