Development and performance demonstration of the NANOMEFOS non-contact measurement machine for freeform optics

conference paper
2009
Henselmans, R.

Cacace, L.A.

Kramer, G.F.I.

Rosielle, P.C.J.N.

Steinbuch, M.
This paper shows the machine concept, the realization and the test results of the completed NANOMEFOS non-contact measurement machine for freeform optics. The separate short metrology loop results in a stability at standstill of 0.9 nm rms over 0.1 s. Measurements of a tilted flat show a repeatability of 2-4 nm rms, depending on the applied tilt, and a flatness that agrees well with the NMi measurement.
Topics
A-stabilityFreeform opticsMachine conceptsNoncontact measurementsPerformance demonstrationPrecision engineering
TNO Identifier
519600
Repository link
https://resolver.tno.nl/uuid:bf8a5f0f-3167-47cb-975a-af891b9c88e9
ISBN
9780955308260
Publisher
Euspen
Source title
9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009, 2-5 June 2009, San Sebastian, Spain
Editor(s)
Brinksmeier, E.
Burke, T.
Brussel, H. van
Spaan, H.
Collation
4 p.
Pages
164-167
Files
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