Application of the NANOMEFOS non-contact measurement machine in asphere and freeform optics production

conference paper
2010
Henselmans, R.

Gubbels, G.P.H.

Drunen, C. van
The NANOMEFOS machine is capable of fast, non-contact and universal measurement of aspheres and freeforms, up to ø500 mm with a measurement uncertainty below 30 nm (2σ). It is now being applied in asphere and freeform production at TNO.
Topics
AspheresFreeform opticsMeasurement uncertaintyNoncontact measurementsUncertainty analysis
TNO Identifier
493110
Repository link
https://resolver.tno.nl/uuid:c80d80ad-964c-4471-b445-263ce74aeaff
ISSN
21622701
ISBN
9781557528933
Source title
Optical Fabrication and Testing, OFT 2010, 13-17 June, 2010, Jackson Hole, WY, USA
Files
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