Atomic Layer Deposition Applications 7 : Preface

conference paper
2011
Elam, J. W.

De Gendt, S.

Straten, O. van der

Delabie, A.

Londergan, A.

Bent, S. F.

Roozeboom, F.
TNO Identifier
483454
Repository link
https://resolver.tno.nl/uuid:c7a020c3-205b-496e-ad30-7a8ca9dbc54e
Publisher
ECS
Source title
Seventh symposium on Atomic Layer Deposition Applications, Boston, Massachusetts, October - October 12, 2011, as part of the 220th Meeting of The Electrochemical Society.
Collation
VIII p.
Files
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