Atomic Layer Deposition Applications 6 : Preface

conference paper
2010
Elam, J. W.

De Gendt, S.

Straten, O. van der

Delabie, A.

Londergan, A.

Bent, S. F.

Roozeboom, F.
TNO Identifier
483453
Repository link
https://resolver.tno.nl/uuid:27fecc01-bfd8-4e22-bd0c-929c64f0201b
Publisher
ECS
Source title
Sixth symposium on Atomic Layer Deposition Applications, Las Vegas, Nevada,October 10 to October 15, 2010, as part of the 218th Meeting of The Electrochemical Society.
Collation
IX p.
Files
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