Processing, Materials, and Integration of Damascene and 3D Interconnects : Preface

conference paper
2010
Flake, J.C.

Ramm, P.

Rathore, H.S.

Roozeboom, F.

Mathad, G.S.

Leonte, O.M.
TNO Identifier
483450
Repository link
https://resolver.tno.nl/uuid:b7c638f5-4d64-4489-a601-70512407392a
Publisher
ECS
Source title
Processing, Materials and Integration of Damascene and 3D Interconnects, 216th meeting of The Electrochemical Society, in Vienna, Austria, October 4 to 9, 2009
Collation
VI p.
Files
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