Atomic Layer Deposition Applications 8 : Preface

conference paper
2012
Elam, J. W.

Londergan, A.

Straten, O. van der

Roozeboom, F.

De Gendt, S.

Bent, S. F.

Delabie, A.
Topics
Energy
TNO Identifier
483428
Repository link
https://resolver.tno.nl/uuid:2361d948-4204-4600-bb1f-f6ad1237c336
Publisher
ECS
Source title
Atomic Layer Deposition Applications 8, held during the PRiME 2012 joint international meeting of The Electrochemical Society and The Electrochemical Society of Japan, with the technical cosponsorship of the Japan Society of Applied Physics, the Korean Electrochemical Society, the Electrochemistry Division of the Royal Australian Chemical Institute, and the Chinese Society of Electrochemistry. Honolulu, Hawaii, October 7 to 12, 2012
Collation
VII p.
Files
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