Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane

conference paper
2012
Tripathi, A.K.

Putten, B. van der

Steen, J.L. van der

Tempelaars, K.

Cobb, B.

Ameys, M.

Ke, T.H.

Myny, K.

Steudel, S.

Nag, M.

Schols, S.

Vicca, P.

Smout, S.

Genoe, J.

Heremans, P.

Yakimets, I.

Gelinck, G.H.
We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.
Topics
AMOLEDDisplaysFlexibleLow-temperatureMetal-oxide semiconductorsAM-OLEDFlexibleIndium gallium zinc oxides (IGZO)Low temperaturesMetal oxide semiconductorPhotolithography processPolyethylene napthalateProcessing temperatureDisplay devicesFlexible displaysLight emitting diodesPhotolithographyTemperatureThin film transistors
TNO Identifier
482990
Repository link
https://resolver.tno.nl/uuid:b949ccec-e9b8-4486-bbe9-abcc99dc4c97
ISSN
18832490
ISBN
9781627486521
Source title
19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, 4 December 2012 through 7 December 2012, Kyoto
Pages
1782-1785
Files
To receive the publication files, please send an e-mail request to TNO Repository.