Application of the helium ion microscope as a sculpting tool for nanosamples
conference paper
In this paper we propose a few helium ion microscope (HIM)-based methods for sample preparation and modification. In particular we report the use of the HIM to make thin wedge SrTiO3 samples without significant artifacts, the possibility to reshape thin metal lines on an electron transparent membrane and the new method of HIM sample preparation by in situ heating of the samples during He-beam illumination. © 2012 Materials Research Society.
TNO Identifier
474208
ISSN
02729172
ISBN
9781627482516
Source title
2012 MRS Spring Meeting, 9-13 April 2012, San Francisco, CA, USA
Pages
61-72
Files
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