Silicon integrated optomechanical sensors

conference paper
2012
Westerveld, W.J.

Pozo Torres, J.M.

Muilwijk, P.J.

Harmsma, P.J.

Nieuwland, R.A.

Berg, J.H. van den

Tabak, E.

Dool, T.C. van den

Leinders, S.M.

Dongen, K.W.A. van

Yousefi, M.

Urbach, H.P.
TNO Identifier
464716
Repository link
https://resolver.tno.nl/uuid:07c0ebc8-d855-4b41-8ecb-506f9ab60f43
Source title
WS7: Low-Cost Open Access to Photonic Integration Technology. 4th European Photonic Integration Forum, part of the 38th European Conference and Exhibition on Optical Communication (ECOC) 2012, Amsterdam, The Netherlands, September 16, 2012
Collation
14 p.
Files
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