Deposition of zinc oxide using an atmospheric low temperature plasma process

conference paper
2010
Winands, G.J.J.

Theelen, M.J.

Kouijzer, S.

Deelen, J. van

Graaf, A. de

Poodt, P.W.G.
Topics
atmospheric pressure plasmaCVDzinc oxideplasma annealingzinc acetyleacetonate
TNO Identifier
464457
Repository link
https://resolver.tno.nl/uuid:be6b2559-e767-47bb-923e-ca14e9b8ae92
Source title
6th International Conference on Coatings on Glass and Plastics - Advanced Coatings for Large-Area or High-Volume Products, ICCG6, Prague, Czech Republic, September 3-5, 2010
Collation
3 p.
Files
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