Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate

article




Ugur, D.

Storm, A.J.

Verberk, R.

Brouwer, J.C.

Sloof, W.G.
TNO Identifier
462705
Repository link
https://resolver.tno.nl/uuid:48ffcf8a-2adf-4654-8cac-cde2ac6c01c1
ISSN
0734-2101
Source
Journal of Vacuum Science Technology A, 30(January/February), pp. 031603-1 - 031603-6.
Publisher
American Vacuum Society
Collation
6 p.
Pages
031603-1 - 031603-6
Files
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