Development of an innovative Z-Theta direct drive actuator

conference paper
2011
Lent, M. van

Smeltink, J.

Theeuwes, J.

Knaapen, R.

Meessen, K.

Paulides, J.
Topics
Physics
TNO Identifier
462447
Repository link
https://resolver.tno.nl/uuid:51d9f5fb-86d0-4c66-ad1e-de581898bcf9
ISBN
9780955308291
Source title
11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011, 23 May 2011 through 26 May 2011
Pages
59-63
Files
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