Vibration characterization of a MEMS 3D force sensor

conference paper
2011
Erinc, M.

Wiel, H.J. van de

Werkhoven, R.J.

Pongrácz, A.

Battistig, G.

Fischer, H.R.
TNO Identifier
462274
Repository link
https://resolver.tno.nl/uuid:1f44d31f-253d-4fd2-88f5-c28fce7d244b
Source title
12th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2011, 18-20 April, 2011, Linz, Austria
Files
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