Efficient extraction of thin-film thermal parameters from numerical models via parametric model order reduction
article
In this paper we present a novel highly efficient approach to determine material properties from measurement results. We apply our method to thermal properties of thin-film multilayers with three different materials, amorphous silicon, silicon nitride and silicon oxide. The individual material properties are identified by solving an optimization problem. For this purpose, we build a parameterized reduced-order model from a finite element (FE) model and fit it to the measurement results. The use of parameterized reduced-order models within the optimization iterations speeds up the transient solution time by several orders of magnitude, while retaining almost the same precision as the full-scale model. © 2010 IOP Publishing Ltd.
Topics
Finite element modelsFull-scale modelsMaterial propertyMeasurement resultsNumerical modelsOptimization problemsOrders of magnitudeParameterizedParametric modelsReduced order modelsThermal parametersThermal propertiesTransient solutionsAmorphous filmsFinite element methodMaterials propertiesSilicon nitrideSilicon oxidesThermodynamic propertiesThin film devicesAmorphous silicon
TNO Identifier
461594
DOI
https://dx.doi.org/10.1088/0960-1317/20/4/045030
ISSN
09601317
Source
Journal of Micromechanics and Microengineering, 20(4)
Article nr.
No.: 045030
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