Efficient extraction of thin-film thermal parameters from numerical models via parametric model order reduction
article
In this paper we present a novel highly efficient approach to determine material properties from measurement results. We apply our method to thermal properties of thin-film multilayers with three different materials, amorphous silicon, silicon nitride and silicon oxide. The individual material properties are identified by solving an optimization problem. For this purpose, we build a parameterized reduced-order model from a finite element (FE) model and fit it to the measurement results. The use of parameterized reduced-order models within the optimization iterations speeds up the transient solution time by several orders of magnitude, while retaining almost the same precision as the full-scale model. © 2010 IOP Publishing Ltd.
Topics
Finite element modelsFull-scale modelsMaterial propertyMeasurement resultsNumerical modelsOptimization problemsOrders of magnitudeParameterizedParametric modelsReduced order modelsThermal parametersThermal propertiesTransient solutionsAmorphous filmsFinite element methodMaterials propertiesSilicon nitrideSilicon oxidesThermodynamic propertiesThin film devicesAmorphous silicon
TNO Identifier
461594
ISSN
09601317
Source
Journal of Micromechanics and Microengineering, 20(4)
Article nr.
No.: 045030
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