A batch process micromachined thermoelectric energy harvester: Fabrication and characterization
article
Micromachined thermopiles are considered as a cost-effective solution for energy harvesters working at a small temperature difference and weak heat flows typical for, e.g., the human body. They can be used for powering autonomous wireless sensor nodes in a body area network. In this paper, a micromachined thermoelectric energy harvester with 6 μm high polycrystalline silicon germanium (poly-SiGe) thermocouples fabricated on a 6 inch wafer is presented. An open circuit voltage of 1.49 V and an output power of 0.4 μW can be generated with 3.5 K temperature difference in a model of a wearable micromachined energy harvester of the discussed design, which has a die size of 1.0 mm × 2.5 mm inside a watch-size generator. © 2010 IOP Publishing Ltd.
Topics
6 inch wafersBatch processBody Area NetworkCost-effective solutionsDie sizeEnergy HarvesterHeat flowsHuman bodiesMicromachinedOutput powerPoly-crystalline siliconPoly-SiGeTemperature differencesThermoelectric energyWireless sensor nodeBatch data processingElectric network synthesisGermaniumHarvestersOpen circuit voltagePolysiliconSemiconducting silicon compoundsSensor nodesSilicon wafersTelecommunication equipmentThermocouplesThermopilesEnergy harvesting
TNO Identifier
461541
ISSN
09601317
Source
Journal of Micromechanics and Microengineering, 20(10)
Article nr.
No.: 104005
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