Micromachined polycrystalline si thermopiles in a T-shirt
article
The technology for in-plane poly-Si thermopiles has been developed. The bulkmicromachined thermopiles are located between two Si bars and connected thermally with those bars through thin-film thermal shunts. The patterned strips of thermocouple material together with thermal shunts form bridges between Si bars. Two versions of a thermoelectric generator (TEG) with micromachined thermopiles have been assembled and tested on a person's wrist, and when integrated in a T-shirt. The TEG still produces less than 1 μW in the office, but at ambient temperatures below 11-13 °C it produces more than 1 μW at a voltage of more than 2 V on the matched load. The new way of integration of wearable TEG in clothing is shown. The TEG is located under the textile, and the fabric is used as a flexible radiator. © 2011 IFSA.
Topics
Energy harvesterEnergy scavengerMEMSMicromachiningThermoelectric generatorThermopileWearable deviceAmbient temperaturesBulk-micromachinedEnergy HarvesterEnergy scavengerIn-planeMatched loadMicromachinedPolycrystalline-SiT-shirtsThermal shuntThermoelectric generatorsWearable devicesMEMSMicromachiningPolysiliconTernary systemsThermocouplesThermoelectric equipmentThermopilesThermoelectricity
TNO Identifier
461481
ISSN
17265479
Source
Sensors and Transducers, 127(4), pp. 15-26.
Pages
15-26
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