Design, modeling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester
conference paper
This paper reports on the design, modelling, fabrication and characterization of an electret-based MEMS electrostatic energy harvester with an elegant and robust process flow. The fabrication is based on a SOI wafer with self-aligned electrodes of the variable capacitor. The output current of the device shows distinct steps that are caused by strong lateral electrostatic forces. An electro-mechanical model was used to analyze and confirm the observed behaviour. © 2011 IEEE.
Topics
ElectretElectrostaticEnergy harvesterMEMSSABERScavengingVariable capacitorVibration generationElectromechanical modelsElectrostatic energiesEnergy harvesterOutput currentProcess flowsSABERSelf-aligned electrodesSOI wafersVariable capacitorVibration generationActuatorsCapacitorsElectretsElectrostatic actuatorsElectrostatic forceFabricationHarvestersMicrosystemsSolid-state sensorsEnergy harvesting
TNO Identifier
461421
ISBN
9781457701573
Article nr.
No.: 5969847
Source title
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 5 June 2011 through 9 June 2011, Beijing
Pages
739-742
Files
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