Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics

article




Poodt, P.W.G.

Knaapen, R.

Illiberi, A.

Roozeboom, F.

Asten, A. van
Topics


Spatial atomic layer depositionRoll-to-rollFlexible elextronics
TNO Identifier
445959
Repository link
https://resolver.tno.nl/uuid:ec7a7d5e-15ce-4568-a255-6d69a29809ff
Source
Journal of Vacuum Science Technology A, 30(January/February), pp. 01A142-1 - 01A142-5.
Publisher
American Vacuum Society AVS
Collation
5 p.
Pages
01A142-1 - 01A142-5
Files
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