Closed-loop control of a laser assisted carbon nanotube growth process for interconnects in flexible electronics
conference paper
A feedback control mechanism based on infrared radiation monitoring coupled with reflectivity information was developed to control the temperature of a laser assisted chemical vapor deposition process for the growth of carbon nanotube forests. An infrared laser operating at 808 nm is focused on a silicon substrate containing a 20 nm-aluminum-oxide layer and a 1.5 nm-iron catalyst layer. The growth takes place in an argon/ hydrogen/ ethylene gaseous environment. SEM and Raman spectroscopy analysis show that good controllability and reproducibility is achieved over multiple experiments.
TNO Identifier
445673
ISSN
02729172
ISBN
9781605113425
Source title
2011 MRS Spring Meeting, 25-April 2011, San Francisco, CA, USA
Pages
75-80
Files
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