A design-of-experiments approach to characterizing beam-induced deposition in the helium ion microscope

article



Scipioni, L.

Sanford, C.,

Veldhoven, E. van

Maas, D.
TNO Identifier
445274
Repository link
https://resolver.tno.nl/uuid:40d5ec7d-ee0e-4ca6-88c2-fc685d884b99
Source
Microscopy Today, 19(3), pp. 22-26.
Pages
22-26
Files
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