Silicon on insulator photonic integrated sensors: on-chip sensing and interrogation
conference paper
In this paper, we present two examples of photonic sensors based on ring resonators in Silicon-on-Insulator (SOI) waveguide technology as mass production compatible sensing units for the measurement of: strain, and ultrasound. Furthermore, the sensing units are characterized in extreme conditions to validate their robustness in harsh industrial environments. In addition, the monitoring of these sensing units is presented as an application of an on-chip 3x3 interferometer.
Topics
TNO Identifier
436211
ISBN
978-1-4577-0881-7
Publisher
IEEE
Article nr.
5970854
Source title
International Conference on Transparent Optical Networks, ICTON, 26-30 June 2011, Stockholm, Sweden
Place of publication
Piscataway, NJ, USA
Files
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