Towards a fibre to waveguide coupling scheme
conference paper
Silicon based SOI PICs are finding new applications in the field of sensing. Since Silicon does not produce light, to deploy these sensors in real-world applications a fiber-chip connection is required. In this work we detail the fabrication of V-grooves for fiber attachment to the chip, including the design, (hard) masking and the etching process. Our results show that V-groove attached fibre is an optimized solution for SOI based sensor PICs.
TNO Identifier
427940
Source title
Proceedings Symposium IEEE Photonics Benelux Chapter. Proc. 2010 Annual Symposium of the IEEE Photonics Society Benelux Chapter, Delft, The Netherlands, November 2010
Place of publication
Delft
Pages
229-232
Files
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