Development of APCVD process for high quality TCO

Deelen, J. van; Mol, A.M.B. van; Poodt, P.W.G.; Grob, F.; Spee, C.I.M.A.

Development of APCVD process for high quality TCO

conference paper

2009

Deelen, J. van

Mol, A.M.B. van

Poodt, P.W.G.

Grob, F.

Spee, C.I.M.A.

For the past decade TNO has been involved in the research and development of atmospheric pressure CVD (APCVD) and plasma enhanced CVD (PECVD) processes for deposition of transparent conductive oxides (TCO), such as tin oxide and zinc oxide. The use of atmospheric deposition processes allows for large scale roll to roll manufacturing, and is therefore expected to provide a breakthrough for lowering the price of thin film PV modules.

Topics

Atmospheric deposition process Atmospheric pressure CVD Plasma-enhanced CVD PV modules Research and development Roll to roll manufacturing Transparent conductive oxides Meteorological problems Plasma deposition Tin oxide Titanium compounds Zinc oxide Chemical vapor deposition

TNO Identifier

352070

Repository link

https://resolver.tno.nl/uuid:834dafb6-8bb1-4890-b9d8-0a72528bb3c8

ISSN

01608371

ISBN

9781424429509

Article nr.

5411680

Source title

34th IEEE Photovoltaic Specialists Conference, PVSC 2009, 7-12 June 2009, Philadelphia, PA, USA

Pages

271-275

Files

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Development of APCVD process for high quality TCO

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