Photonic pressure sensor in silicon on insulator

conference paper
2009
Harmsma, P.J.

Engelmann, M.J.

Schmits, R.

Westerveld, W.J.

Berg, J.H. van den

Agovic, K.

Vliet, R.E. van

Yousefi, M.
TNO Identifier
248220
Repository link
https://resolver.tno.nl/uuid:c89b964e-72d2-41ea-9acf-86a30db2d4bf
ISBN
9781424440801
Article nr.
5196279
Source title
CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, 14 June 2009 through 19 June 2009, Munich. Conference code: 78301
Files
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