Numerical investigation of turbomolecular pumps using the direct simulation Monte Carlo method with moving surfaces

article



Versluis, R.

Dorsman, R.

Thielen, L.

Roos, M.E.
A new approach for performing numerical direct simulation Monte Carlo (DSMC) simulations on turbomolecular pumps in the free molecular and transitional flow regimes is described. The chosen approach is to use surfaces that move relative to the grid to model the effect of rotors and stators on a gas flow. The current article describes the method and compares the results to experimental and theoretical data by Sawada [Bull. JSME 22, 362 (1979)]. The agreement between our results and Sawada's results are excellent. © 2009 American Vacuum Society.
Topics











Direct simulation monte carloDirect simulation monte carlo methodsGas flowsMoving surfacesNew approachesNumerical investigationsTransitional flow regimesTurbo molecular pumpsFlow simulationMonte Carlo methodsPumpsDirect numerical simulation
TNO Identifier
241541
Repository link
https://resolver.tno.nl/uuid:97aaa7a7-52c3-43a5-b677-59ad82d5f376
ISSN
07342101
Source
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 27(3), pp. 543-547.
Pages
543-547
Files
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