Design, realization and testing of the nanomefos non-contact measurement machine for freeform optics
conference paper
By applying freeform optics (figure 1) in high-end optical systems such as used in space, science and lithography applications, system performance can be improved while decreasing the system mass, size and number of required components (for instance [1]). The applicability of classical metrology methods is limited for freeform surfaces, which is currently holding back their widespread application. TNO, TU/e and NMi VSL therefore initiated the NANOMEFOS project in 2004 [2]. The development of this universal non-contact and fast measurement machine with 30 nm uncertainty (2σ) for freeform optics up to Æ500 mm is now nearing completion.
TNO Identifier
481456
ISBN
9781887706483
Source title
23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE, 19-24 October 2008, Portland, OR, USA
Collation
4 p.
Place of publication
Delft