Active vibration isolation of a rigidly mounted turbo pump
conference paper
Manufacturers of precision equipment are constantly aiming at increased accuracy. Elimination of disturbing vibrations is therefore getting more and more important. The technical limitations of passive isolation methods require alternative strategies for vibration reduction, such as active techniques. In this paper active vibration isolation of internal vibration sources is considered. Due to static requirements, passive vibration isolation of such internal components can often not or hardly be achieved. As such an internal source a turbomolecular vacuum pump is considered. These pumps are applied in precision equipment applications where high vacuum is required and can for various reasons hardly be passively isolated from their environment. A laboratory setup has been developed, based on a rigidly connected turbomolecular pump. The active system is based on adaptive feedforward/feedback control. The control performance and robustness are enhanced using an Internal Model Control scheme. The experimental setup and the control system will be described and initial results with tonal control will be discussed. It will be shown that with active vibration isolation substantial vibration isolation can be achieved leading to global vibration reduction.© (2006) by the International Institute of Acoustics & Vibration.
TNO Identifier
478743
ISBN
9781627481502
Publisher
Vienna University of Technology
Source title
13th International Congress on Sound and Vibration 2006, ICSV 2006, 2-6 July 2006, Vienna, Austria
Editor(s)
Eberhardsteiner, J.
et al
et al
Place of publication
Vienna, Austria
Pages
763-770