LTCC phase shifter modules for RF-MEMS-switch integration
conference paper
The European 1ST project ARHMS is covering a wide field of R&D activities with the final goal: a satellite based car communication system with a fiat electronically steerable roof antenna based on RF-MEMS. The required phase shift for beam steering will be done with MEMS switches and RF networks. An integratable LTCC packaging and wiring module with the MEMS and the passives has to be placed and connected close to the patch antenna. LTCC as a ceramic interconnection technology for processing multilayer boards, multi-chip-modules and packages, enables increased circuit density and high reliable structures. Within this work the good integration opportunities and the low loss of LTCC were reasons for the choice as well as thermal conductivity and the possibility to build cavities and windows, to integrate the RF-switches and SMDs and to guide the RF signal in a power range around 5 watt (Tx). Initial material studies and investigation, simulations of the RF conditions, technology improvements in structuring and processing LTCC as well as numerous test runs and measurements had been done to develop an initial test substrate. These early test structures were used to verify the design and simulation surrounding. The extracted correlation data allow the most promising layout work. Copyright © 2005 IMAPS.
TNO Identifier
472422
Source title
1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005, 10-13 April 2005, Baltimore, MD, USA
Pages
67-72