Thermal model of miniaturized Schottky emitter for parallel electron beam lithography
conference paper
TNO Identifier
239701
ISBN
9781424404018
Publisher
IEEE
Article nr.
No.: 4134625
Source title
19th International Vacuum Nanoelectronics Conference and 50th International Field Emission Symposium, IVNC and IFES 2006, 17-20 July 2006, Guilin, China
Pages
393-394
Files
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