Capacitive pressure sensor in post-processing on LTCC substrates

article




Meijerink, M.G.H.

Nieuwkoop, E.

Veninga, E.P.

Meuwissen, M.H.H.

Tijdink, M.W.W.J.
A capacitive pressure sensor was realized by means of a post-processing step on a low temperature co-fired ceramics (LTCC) substrate. The new sensor fabrication technology allows for integration of the sensor with interface circuitry and possibly also wireless transmission circuits on LTCC substrates to realize a truly autonomous sensor unit. A special feature of this sensor technology is the flush surface. The article describes the design considerations, and compares experimental data to the theoretical design. Special point of attention is the long-term behaviour of the soldering joint. Various design variants have been evaluated considering reproducibility and creep behaviour.
Topics














Autonomous sensorsCapacitiveLTCCPressure sensorSolderingCapacitanceCeramic materialsLow temperature effectsPressure effectsSolderingSubstratesCreep behaviorInterface circuitryLTCC substratePressure sensors
TNO Identifier
238711
Repository link
https://resolver.tno.nl/uuid:33bcaf6c-26ad-4c2a-8b7a-b71468d1f98e
ISSN
09244247
Source
Sensors and Actuators, A: Physical, 123-124, pp. 234-239.
Publisher
Elsevier
Collation
6 p.
Place of publication
Amsterdam
Pages
234-239
Files
To receive the publication files, please send an e-mail request to TNO Repository.