In-process monitoring of grinding and polishing of optical surfaces
article
A new tool with which to monitor the quality (roughness and subsurface damage) of optical surfaces during grinding and polishing, intensity-detecting total internal reflection microscopy (iTIRM), is presented. A general description of the new measurement method is given, followed by a description of the experimental in situ measurement setup. Experimental results of the method are presented that demonstrate that iTIRM can be used either to control the roughness-reduction process during production or to investigate the process itself. The possibility of implementing the method in an optical workshop is discussed.
TNO Identifier
525198
Source
Applied Optics, 39(16), pp. 3300-3303.
Publisher
Optical Society of America OSA
Collation
4 p.
Pages
3300-3303
Files
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