Quantitative surface characterization using a Nomarski microscope
conference paper
The use of a Nomarski microscope for the characterization of surface features will be presented. Since a Nomarski microscope measures slope values, the shape of a surface can be followed quantitatively. Besides, a Nomarski microscope can be used to analyze surface roughness in terms of rms value and a distinction between different types of surface roughness is possible. Examples of Nomarski measurements will be shown and discussed.
TNO Identifier
525194
Publisher
TNO
Source title
Optical Fabrication and Testing, 18-22 June 2000, Québec, GQ, Canada
Editor(s)
Tatsuno, K.
Collation
3 p.
Files
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