Quantitative roughness measurements with iTIRM
conference paper
A new method, iTIRM, is used for quantitative surface roughness measurements of ground and polished surfaces and it is shown to be a useful tool for measuring total surface quality instead of individual roughness parameters.
TNO Identifier
525172
Publisher
Optical Society of America OSA
Source title
Optical Fabrication and Testing, 18-22 June 2000, Québec, GQ, Canada
Collation
3 p.
Files
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