iTIRM: a nondestructive measuring technique to monitor surface quality during grinding and polishing
conference paper
A new measurement method, called iTIRM, is presented. It is capable of measuring the surface quality, roughness and subsurface damage, of optical surfaces in a nondestructive way. Measurements have been carried out and are presented, showing the capability of iTIRM to quantify the quality of optical surfaces and to localize surface defects. The iTIRM measurement method is also suitable for in-situ measurements of optical surfaces during fabrication because it is nondestructive and is not obstructed by working tools required for the production process. The results of in-situ measurements will also be presented, showing that iTIRM is a useful tool for process investigation and process control.
TNO Identifier
516768
Source title
International Conference on Trends in Optical Nondestructive Testing, 3-6 May 2000, Lugano, Switzerland
Editor(s)
Rastogi, P.K.
Inaudi, D.
Inaudi, D.
Collation
8 p.
Files
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