Subsurface damage measurements as a tool for process monitoring
conference paper
A new method is presented that is capable of measuring the surface quality, including subsurface damage, of optical surfaces. This method, called iTIRM, can easily be automated and used for process control and as an investigation tool for optical fabrication processes.
TNO Identifier
499297
Publisher
TNO
Source title
ASPE 1999 Annual Meeting, Monterey, CA, USA, 31 October - 5 November 1999
Collation
4 p.
Pages
606-609
Files
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