Technological and Physical Compatibilities in Hybrid Integration of Laser and Monolithic Integration of Waveguide, Photodetector and CMOS Circuits on Silicon
conference paper
In this paper, technological and physical compatibilities in hybrid integration of AlInGaP laser and monolithic integration of ZnO monomode waveguide, pin-photodetector, CMOS circuits for laser power control and signal amplification on silicon substrate are studied. Prospective problems and their possible solutions are discussed. Also experimental results are presented.
TNO Identifier
94689
Publisher
Platform Sensor Technology
Source title
Proceedings of the Dutch Conference on Sensor Technology 1994, University of Twente, Enschede, The Netherlands, February 17-18, 1994
Editor(s)
Lambeck, P.V.
Place of publication
Z.pl.
Pages
205-210