Basic Opto-electronics on Silicon for Sensor Applications
conference paper
A general platform for integrated opto-electronic sensor systems on silicon is proposed. The system is based on a hybridly integrated semiconductor laser, ZnO optical waveguides and monolithic photodiodes and electronic circuiry.
TNO Identifier
94688
Publisher
Platform Sensor Technology
Source title
Proceedings of the Dutch Conference on Sensor Technology 1994, University of Twente, Enschede, The Netherlands, February 17-18, 1994
Editor(s)
Lambeck, P.V.
Place of publication
Z.pl.
Pages
189-193