Applicability of iTIRM for roughness reduction monitoring
conference paper
The results obtained with iTIRM during polishing are presented. It is shown that iTIRM unites the working ranges of several other techniques where iTIRM can be used during production where the others can not. The applicable range of iTIRM is shown to be at least 1 μm down to 0.1 nm rms.
Topics
TNO Identifier
236308
ISSN
0277786X
Publisher
SPIE
Source title
Optical Manufacturing and Testing IV, 31 July - 2 August 2001, San Diego, CA, USA
Editor(s)
Philip Stahl, H.
Collation
5 p.
Pages
340-344