(1 - 20 of 82)

Pages

document
Creyghton, Y.L.M. (author), Poodt, P.W.G. (author), Simor, M. (author), Roozeboom, F. (author)
A plasma source has an outer surface, interrupted by an aperture for delivering an atmospheric plasma from the outer surface. A transport mechanism transports a substrate in parallel with the outer surface, closely to the outer surface, so that gas from the atmospheric plasma may form a gas bearing between the outer surface the and the substrate...
patent 2022
document
Knaapen, R.J.W. (author), Olieslagers, R. (author), van den Berg, D. (author), van den Boer, M.C. (author), Roozeboom, F. (author)
Method of performing atomic layer deposition. The method comprises supplying a precursor gas towards a substrate, using a deposition head including one or more gas supplies, including a precursor gas supply. The precursor gas reacts near a surface of the substrate for forming an atomic layer. The deposition head has an output face comprising the...
patent 2021
document
Mameli, A. (author), Fawzy, A. (author), Roozeboom, F. (author), Poodt, P.W.G. (author)
The present disclosure concerns an atomic layer deposition device for area-selective deposition of a target material layer onto a deposition area of a substrate surface further comprising a non-deposition area. In use the substrate is conveyed along a plurality of deposition and separator spaces including at least two gas separator spaces...
patent 2021
document
Mameli, A. (author), Kronemeijer, A.J. (author), Roozeboom, F. (author)
The present disclosure relates to a method of manufacturing a thin film device (100). A multilevel nanoimprint lithography template (20) is transferred into a thin film stack comprising an electrode layer (11) and a blanket sacrificial layer (12) covering the electrode layer. The template is transferred, thereby patterning the device (100) and...
patent 2021
document
Roozeboom, F. (author), Ehm, D.H. (author), Illiberi, A. (author), Becker, M. (author), te Sligte, E. (author), Creijghton, Y.L.M. (author)
A method for at least partially removing a contamination layer (24) from an optical surface (14a) of an optical element (14) that reflects EUV radiation includes: performing an atomic layer etching process for at least partially removing the contamination layer (24) from the optical surface (14a), which, in tum, includes: exposing the...
patent 2021
document
Vermeer, A.J.P.M. (author), Roozeboom, F. (author), van Deelen, J. (author)
Method of depositing an atomic layer on a substrate. the method comprises supplying a precursor gas fraom a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the presursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the...
patent 2020
document
van der Heijden, A.E.D.M. (author), van Geest, E.P. (author), van den Elshout, J.J.M.H. (author)
The invention pertains to the synthesis of carbamate and urea compounds. In particular the invention is directed to the synthesis of carbamate and urea compounds which may be used in the production of compounds that are used to stabilize nitrocellulose. The method of the invention comprises preparing a carbamate or urea derivative comprising...
patent 2020
document
Straathof, M.H. (author), van Driel, C.A. (author)
Propellant charges or grains having printed layers of two or more energetic materials are described along with methods for preparing and using them.
patent 2020
document
Roozeboom, F. (author), Lankhorst, A.M. (author), Poodt, P.W.G. (author), Koster, N.B. (author), Winands, G.J.J. (author), Vermeer, A.J.P.M. (author)
The invention relates to an apparatus for reactive ion etching of a substrate, comprising: a plasma etch zone including an etch gas supply and arranged with a plasma generating structure for igniting a plasma and comprising an electrode structure arranged to accelerate the etch plasma toward a substrate portion to have ions impinge on the...
patent 2017
document
Vermeer, A.J.P.M. (author), Roozeboom, F. (author), van Deelen, J. (author)
Method of depositing an atomic layer on a substrate. The method comprises supplying a precursor gas from a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the precursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the...
patent 2017
document
van den Brand, J. (author), Dietzel, A.H. (author), Broers, S.C. (author), Saalmink, M. (author)
The invention relates to an apparatus for laminating a first and a second sheet with a plane carrier (10) and a drum shaped carrier (20) for carrying a respective sheet. The apparatus has a first main operational mode wherein the drum shaped carrier (20) is at distance from a first carrier surface (12) of the plane carrier (10) in said third...
patent 2016
document
Vermeer, A.J.P.M. (author), Roozeboom, F. (author), van Deelen, J. (author)
Method of depositing an atomic layer on a substrate. The method comprises supplying a precursor gas from a precursor-gas supply of a deposition head that may be part of a rotatable drum. The precursor gas is provided from the precursor-gas supply towards the substrate. The method further comprises moving the precursor-gas supply by rotating the...
patent 2016
document
Creyghton, Y.L.M. (author), Poodt, P.W.G. (author), Simor, M. (author), Foozeboom, F. (author)
patent 2015
document
Jedema, F.J. (author), Besling, W.F.A. (author), Roozeboom, F. (author), van den Boomen, R.W.J.M. (author), van Straten, F.E. (author)
patent 2015
document
Klootwijk, J.H. (author), Roozeboom, F. (author), Ruigrok, J.J.M. (author), Reefman, D. (author)
An integration substrate for a system in package comprises a through-substrate via and a trench capacitor wherein with a trench filling that includes at least four electrically conductive capacitor-electrode layers in an alternating arrangement with dielectric layers. --The capacitor-electrode layers are alternatingly connected to a respective...
patent 2014
document
Strijkers, R.J. (author), Norp, A.H.J. (author)
The present invention enables a network operator to select a gateway that provides desirable operational parameters to access a network node function in a network node requested by a client. A network service provider detects what service a client device is requesting or using and selects a gateway (e.g. PDN-GW) to deliver the service. The...
patent 2014
document
Strijkers, R.J. (author), Meulenhoff, P.J. (author)
The invention provides a method wherein a first network node advertises available resources that a second network node may use to offload network node functions transparently to the first network node. Examples of the first network node are a client device (e.g. PC, notebook, tablet, smart phone), a server (e.g. application server, a proxy...
patent 2014
document
Roozeboom, F. (author), Lifka, H. (author), Vanhelmont, F. (author), Dekkers, W. (author)
An electronic device comprising at least one die stack having at least a first die (D1) comprising a first array of light emitting units (OLED) for emitting light, a second layer (D2) comprising a second array of via holes (VH) and a third die (D3) comprising a third array of light detecting units (PD) for detecting light from the first array of...
patent 2014
document
Roozeboom, F. (author), Goossens, M. (author), Besling, W.F.A. (author), Verhaegh, N. (author)
The invention relates to an semi-conductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first...
patent 2014
document
van Vliet, L.D. (author), Schuurbiers, C.A.H. (author), Tata Nardini, F. (author)
An electric non-pyrotechnic ignition head (100) suitable for use in an electro- pyrotechnic igniter (1), comprising: a housing (102) defining a front opening (106); - an electrically insulative, thermally conductive bridge filament support body (130) that is at least partly disposed in said front opening, and that defines a frontal heating...
patent 2014
(1 - 20 of 82)

Pages