Searched for: subject:"plasma"
(1 - 20 of 185)

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Merkx, M.J.M. (author), Jongen, R.G.J. (author), Mameli, A. (author), Lemaire, P.C. (author), Sharma, K. (author), Hausmann, D.M. (author), Kessels, W.M.M. (author), Mackus, A.J.M. (author)
As the semiconductor industry progresses toward more complex multilayered devices with ever smaller features, accurately aligning these layers with respect to each other has become a bottleneck in the advancement to smaller transistor nodes. To avoid alignment issues, area-selective atomic layer deposition (ALD) can be employed to deposit...
article 2021
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Stephan, U. (author), Steinke, O. (author), Ushakov, A. (author), Verlaan, A.L. (author), de Bock, M. (author), Moser, L. (author), Maniscalco, M.P. (author), van Beekum, E.R.J. (author), Verhoeff, P. (author)
The Visible Spectroscopy Reference System (55.E6.VSRS) is going to be one of the first optical diagnostic systems in the ITER tokamak chamber, for which plasma cleaning system of front-end optics has to be implemented. In order to extract light out of the fusion plasma towards diagnostic sensor systems, a set of optics forming a labyrinth will...
article 2021
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Hemme, M. (author), Fidder, A. (author), van der Riet-van Oeveren, D. (author), van der Schans, M.J. (author), Noort, D. (author)
The primary aim of this study was to identify biomarkers of exposure to some so-called Schedule 1 sulfur mustard (HD) analogues, in order to facilitate and expedite their retrospective analysis in case of alleged use of such compounds. Since these HD analogues can be regarded as model compounds for possible impurities of HD formed during...
article 2021
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van Veldhoven, J. (author), Stodólna, A.S. (author), Storm, A.J. (author), van den Brink, J. (author), Geerits, N. (author), Vlaar, J. (author), Dekker, M.F. (author), Ushakov, A. (author)
article 2021
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Miermans, C.J.H. (author), Dijkmans, E. (author), Krystek, P.W. (author)
The ability to track & trace materials is a key feature in the entire chain, and it ensures circularity principles. Examples from plastic recycling show the enormous added value that analytical technology can have for the circular economy. During polymer production and recycling processes, pigments can be added for different purposes; e.g. as...
article 2020
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Ushakov, A. (author), Verlaan, A.L. (author), Stephan, U. (author), Steinke, O. (author), de Bock, M. (author), Maniscalco, M.P. (author), Verhoeff, P. (author)
The Visible Spectroscopy Reference System (VSRS.55.E6) is going to be one of the first optical diagnostics in the ITER tokamak chamber. For the VSRS diagnostic system, the 100 mm diameter first mirror (FM) located at the front end of the optical system is expected to experience contamination primarily with beryllium and tungsten. Small levels of...
article 2020
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Ushakov, A. (author), Stephan, U. (author), Steinke, O. (author), Verlaan, A.L. (author), de Bock, M. (author), Maniscalco, M.P. (author), Verhoeff, P. (author)
The Visible Spectroscopy Reference System (VSRS.55.E6) is going to be one of the first optical diagnostics in the ITER tokamak. The VSRS front-end part shall contains the 100 mm diameter first mirror (FM). The FM is expected to experience contamination with beryllium and tungsten. Levels of contamination on the order of 10 nm degrade the FM...
conference paper 2020
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Ushakov, A. (author), Velthuis, J.F.M. (author), Koster, N.B. (author), Janssen, J.P.B. (author)
The new generation compact X-ray source for semiconductor metrology requires a brilliance that is higher than existing technology can offer. In this report, we propose a new X-ray source where an electron beam is focused on a rotating liquid metal anode. We assume that high brilliance emission can be achieved with power densities up to 10 MW/mm2...
conference paper 2020
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Mameli, A. (author), Roozeboom, F. (author), Poodt, P. (author)
public lecture 2019
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Mameli, A. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
public lecture 2019
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van den Brand, H. (author), Bongers, W.A. (author), Stober, J.K. (author), Kasparek, W. (author), Wagner, D. (author), Doelman, N.J. (author), Klop, W.A. (author), Giannone, L. (author), Reich, M. (author), Westerhof, E. (author), de Baar, M.R. (author)
The successful use of a tokamak for generating fusion power requires an active control of magnetic instabilities, such as neoclassical tearing modes (NTMs). Commonly, the NTM location is determined using electron cyclotron emission (ECE) and this is used to apply electron cyclotron heating (ECH) on the NTM location. In this paper, an inline ECE...
article 2019
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Ushakov, A. (author), Verlaan, A.L. (author), Ebeling, R.P. (author), Wu, C.C. (author), O'Neill, R. (author), Smith, M. (author), Stratton, B. (author), Koster, N.B. (author), Gattuso, A. (author), Lasnier, C.J. (author), Feder, R. (author), Maniscalco, M.P. (author), Verhoeff, P. (author)
One of the important aspects of the service life of the first and second optical mirrors (FM and SM) in ITER UWAVS diagnostics is to understand the influence of plasma cleaning on materials re-deposition and optical surface quality after multiple cleaning cycles. The capacitively coupled RF 30-60 MHz system is a candidate for the UWAVS mirror...
article 2019
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Stortelder, J.K. (author), Storm, A.J. (author), de Rooij-Lohmann, V.I.T.A. (author), Wu, C.C. (author), van Schaik, W. (author)
Novel absorber materials are being developed to improve EUV-reticle imaging performance for the next generations of EUV lithography tools. TNO, together with ASML, has developed a compatibility assessment for novel absorber materials, which addresses the risk that exposure of incompatible materials to EUV-radiation and EUV-plasma conditions...
conference paper 2019
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Faraz, T. (author), Arts, K. (author), Karwal, S. (author), Knoops, H.C.M. (author), Kessels, W.M.M. (author)
Plasma-enhanced atomic layer deposition (PEALD) has obtained a prominent position in the synthesis of nanoscale films with precise growth control. Apart from the well-established contribution of highly reactive neutral radicals towards film growth in PEALD, the ions generated by the plasma can also play a significant role. In this work, we...
article 2019
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Mameli, A. (author), Verheijen, M.A. (author), Mackus, A.J.M. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
Atomic layer etching (ALE) provides Ångström-level control over material removal and holds potential for addressing the challenges in nanomanufacturing faced by conventional etching techniques. Recent research has led to the development of two main classes of ALE: ion-driven plasma processes yielding anisotropic (or directional) etch profiles...
article 2018
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Mora, J. (author), Willems, F.P.T. (author), Seykens, X.L.J. (author), Guardiola, C. (author)
The most recent regulation for diesel engines with regards to NOx emissions and SCR systems considers stringent OBD requirements. In this paper, an observer of the ageing state is developed considering NO, NO2 and NH3 concentrations, the surface coverage ratio θNH3, and the ammonia storage capacity Ω as states. The observer is based on an...
article 2018
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Kuang, Y. (author), Zardetto, V. (author), van Gils, R. (author), Karwal, S. (author), Koushik, D. (author), Verheijen, M.A. (author), Black, L.E. (author), Weijtens, C. (author), Veenstra, S.C. (author), Andriessen, H.A.J.M. (author), Kessels, W.M.M. (author), Creatore, M. (author)
In this work, we present an extensive characterization of plasma-assisted atomic-layer-deposited SnO2 layers, with the aim of identifying key material properties of SnO2 to serve as an efficient electron transport layer in perovskite solar cells (PSCs). Electrically resistive SnO2 films are fabricated at 50 °C, while a SnO2 film with a low...
article 2018
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Kim, Y. (author), Kim, Y.J. (author), Lim, Y. (author), Oh, B. (author), Kim, J.Y. (author), Bouwman, J. (author), Kwon, O. (author)
It is important to understand the association between oxidative stress-related parameters and to evaluate their status in advance of chronic disease development. Further development towards disease can then be prevented by dietary antioxidants. The present study was aimed at assessing the relationship between diet quality, blood antioxidants,...
article 2018
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Mione, M.A. (author), Creyghton, Y. (author), Engeln, R. (author), Kessels, W.M.M. (author), Roozeboom, F. (author)
conference paper 2018
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Ushakov, A. (author), Verlaan, A.L. (author), Ebeling, R.P. (author), Rijfers, A. (author), O'Neill, R. (author), Smith, M. (author), Stratton, B. (author), Koster, N.B. (author), van der List, J.F.M. (author), Gattuso, A. (author), Lasnier, C.J. (author), Feder, R. (author), Maniscalco, M.P. (author), Verhoeff, P. (author)
In ITER, first mirrors for the Upper Wide Angle Viewing System (UWAVS) are expected to experience contamination with beryllium and tungsten. Contamination levels of 10 nm can degrade mirror performance. In the UWAVS, a first mirror cleaning system will use radio-frequency (RF) gas discharge. A mockup in representative geometry was developed. The...
article 2018
Searched for: subject:"plasma"
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